Slide Nr. 11

Physical Reference Data of the NIST Physics Laboratory. There are several online databases listed on this page in the areas of physical constants, atomic and molecular spectroscopic data, and x-ray and gamma-ray data.

Electron Interactions with Plasma Processing Gases data excerpted from recently published articles in the Journal of Physical and Chemical Reference Data (JPCRD). Presented here are collision cross section data and electron transport coefficients for gases, such as CF₄ and CHF₃, used in the manufacturing of semiconductor devices. 

The August 1997 release of The NIST WebBook is the third edition of the NIST Chemistry WebBook which contains thermodynamic data for over 5000 organic and small inorganic compounds and ion-energetics data for over 14,000 compounds. A number of new classes of data have been added including vapor pressure data for over 5000 compounds, Antoine coefficient data for over 1200 compounds, heats of reaction for over 1300 compounds, mass spectra for over 8000 compounds, and IR spectra for over 5000 compounds. There are many avenues for searching the database. Structures are given for most species, as well as common and commercial names.